Reduced thermal processing for ULSI
- Författare
- NATO Advanced Study Institute on Reduced Thermal Processing for ULSI 1988) (Boca Raton : North Atlantic Treaty Organization Roland Albert Levy
- (Edited by Roland A. Levy., "Published in cooperation with NATO Scientific Affairs Division.", "Proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for VLSI, held June 20-July 1, 1988, in Boca Raton, Florida")
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation, Bibliografi
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| Plenum Press | cop. 1989 | USA, New York | xi, 438 sidor. ill. |